{"id":61900,"updated":"2025-01-21T22:27:04.475888+00:00","links":{},"created":"2025-01-18T23:23:57.832703+00:00","metadata":{"_oai":{"id":"oai:ipsj.ixsq.nii.ac.jp:00061900","sets":["1164:2735:5641:5642"]},"path":["5642"],"owner":"10","recid":"61900","title":["最適化アルゴリズムを用いた光近接効果削減に関する研究"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-02-26"},"_buckets":{"deposit":"dbcf6c55-0ad0-41fc-9db2-e611f2c5f896"},"_deposit":{"id":"61900","pid":{"type":"depid","value":"61900","revision_id":0},"owners":[10],"status":"published","created_by":10},"item_title":"最適化アルゴリズムを用いた光近接効果削減に関する研究","author_link":["0","0"],"item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"最適化アルゴリズムを用いた光近接効果削減に関する研究"},{"subitem_title":"Optical Proximity Effect reduction using Optimization Algorithm","subitem_title_language":"en"}]},"item_type_id":"4","publish_date":"2009-02-26","item_4_text_3":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東邦大学大学院理学研究科"},{"subitem_text_value":"産業技術総合研究所"},{"subitem_text_value":"産業技術総合研究所"},{"subitem_text_value":"産業技術総合研究所"},{"subitem_text_value":"産業技術総合研究所"},{"subitem_text_value":"東邦大学大学院理学研究科"}]},"item_4_text_4":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_value":"Toho University","subitem_text_language":"en"},{"subitem_text_value":"National Institute of Advanced Industrial Science and Technology (AIST)","subitem_text_language":"en"},{"subitem_text_value":"National Institute of Advanced Industrial Science and Technology (AIST)","subitem_text_language":"en"},{"subitem_text_value":"National Institute of Advanced Industrial Science and Technology (AIST)","subitem_text_language":"en"},{"subitem_text_value":"National Institute of Advanced Industrial Science and Technology (AIST)","subitem_text_language":"en"},{"subitem_text_value":"Toho University　","subitem_text_language":"en"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_publisher":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"情報処理学会","subitem_publisher_language":"ja"}]},"publish_status":"0","weko_shared_id":10,"item_file_price":{"attribute_name":"Billing file","attribute_type":"file","attribute_value_mlt":[{"url":{"url":"https://ipsj.ixsq.nii.ac.jp/record/61900/files/IPSJ-MPS09073006.pdf","label":"IPSJ-MPS09073006"},"date":[{"dateType":"Available","dateValue":"2011-02-26"}],"format":"application/pdf","billing":["billing_file"],"filename":"IPSJ-MPS09073006.pdf","filesize":[{"value":"1.6 MB"}],"mimetype":"application/pdf","priceinfo":[{"tax":["include_tax"],"price":"660","billingrole":"5"},{"tax":["include_tax"],"price":"330","billingrole":"6"},{"tax":["include_tax"],"price":"0","billingrole":"17"},{"tax":["include_tax"],"price":"0","billingrole":"44"}],"accessrole":"open_date","version_id":"1774592b-6671-4374-a1a3-3498290e6292","displaytype":"detail","licensetype":"license_note","license_note":"Copyright (c) 2009 by the Information Processing Society of Japan"}]},"item_4_creator_5":{"attribute_name":"著者名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"白石, 顕士"},{"creatorName":"野里, 博和"},{"creatorName":"村川, 正宏"},{"creatorName":"坂無, 英徳"},{"creatorName":"樋口, 哲也"},{"creatorName":"古谷, 立美"}],"nameIdentifiers":[{}]}]},"item_4_creator_6":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Kenji, shiraishi","creatorNameLang":"en"},{"creatorName":"Hirokazu, Nosato","creatorNameLang":"en"},{"creatorName":"Masahiro, Murakawa","creatorNameLang":"en"},{"creatorName":"Hidenori, Sakanashi","creatorNameLang":"en"},{"creatorName":"Tetsuya, Higuchi","creatorNameLang":"en"},{"creatorName":"Tatsumi, Furuya","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_4_source_id_9":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN10505667","subitem_source_identifier_type":"NCID"}]},"item_4_textarea_12":{"attribute_name":"Notice","attribute_value_mlt":[{"subitem_textarea_value":"SIG Technical Reports are nonrefereed and hence may later appear in any journals, conferences, symposia, etc."}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourceuri":"http://purl.org/coar/resource_type/c_18gh","resourcetype":"technical report"}]},"item_4_description_7":{"attribute_name":"論文抄録","attribute_value_mlt":[{"subitem_description":"近年，半導体の微細化が進むにつれて，半導体を形成する回路のサイズ（配線幅）が光の波長よりも小さくなっている．そのため，露光光源からの光が，回路パターンが描画された原版（マスクパターン）を通過する際に生じる光の回折現象により，シリコンウェハ上の転写パターンの忠実性が著しく損なわれる光近接効果（OPE:Optical Proximity Effect）が顕著になり，さらなる半導体デバイスの微細化を実現することは，非常に難しくなってきている．そこで，本論文では，複雑化する光近接効果に対応した新しいリソグラフィ技術として，OPEキャンセラー技術を提案し，最適化アルゴリズムと組み合わせることで効果的に光近接効果の削減を図る．提案するOPEキャンセラーの基本原理は，OPEキャンセラー（粒々のパターン）によって最適な光の干渉状態を作り出すことである．検証実験の結果，OPEキャンセラーによりOPEを最大60%の削減を図ることが可能であることを示し，提案する最適化アルゴリズムの工夫によって，精度向上の達成を確認した．","subitem_description_type":"Other"}]},"item_4_description_8":{"attribute_name":"論文抄録(英)","attribute_value_mlt":[{"subitem_description":"Recently, as the size of semiconductor devices becomes ever smaller, the smallest pitch for a circuit pattern is lower than the exposure wavelength. Therefore, it is difficult to achieve further miniaturization in semiconductor, because optical proximity effect (OPE), which is caused by the diffracted light on a mask pattern, becomes more prominent. In order to solve this OPE problem, we proposes OPE cancel method using optimization algorithm. This proposed method called the OPE canceller. The OPE canceller can produce the best light interference to deny an OPE generated from mask patterns. In conducted experiments, we successfully achieved a 60% reduction of OPE using proposed OPE Canceller.","subitem_description_type":"Other"}]},"item_4_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageEnd":"24","bibliographic_titles":[{"bibliographic_title":"研究報告数理モデル化と問題解決（MPS）"}],"bibliographicPageStart":"21","bibliographicIssueDates":{"bibliographicIssueDate":"2009-02-26","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"19(2009-MPS-73)","bibliographicVolumeNumber":"2009"}]},"relation_version_is_last":true,"weko_creator_id":"10"}}