{"links":{},"metadata":{"_oai":{"id":"oai:ipsj.ixsq.nii.ac.jp:00228818","sets":["6164:6165:6462:11379"]},"path":["11379"],"owner":"44499","recid":"228818","title":["ナノ人工物メトリクスの耐クローン性：シンプルな白色干渉計の有効性"],"pubdate":{"attribute_name":"公開日","attribute_value":"2023-10-23"},"_buckets":{"deposit":"3e9aefa2-29fd-4466-a8d0-585d9bd1a58d"},"_deposit":{"id":"228818","pid":{"type":"depid","value":"228818","revision_id":0},"owners":[44499],"status":"published","created_by":44499},"item_title":"ナノ人工物メトリクスの耐クローン性：シンプルな白色干渉計の有効性","author_link":["614163","614165","614168","614166","614164","614171","614167","614170","614172","614169"],"item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ナノ人工物メトリクスの耐クローン性：シンプルな白色干渉計の有効性"},{"subitem_title":"Clone Resistance of Nano-Artifact Metrics: Effectiveness of a Simple White-Light Interferometer","subitem_title_language":"en"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"人工物メトリクス，レジスト倒壊，白色干渉計，耐クローン性","subitem_subject_scheme":"Other"}]},"item_type_id":"18","publish_date":"2023-10-23","item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_18_text_3":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"横浜国立大学"},{"subitem_text_value":"横浜国立大学"},{"subitem_text_value":"横浜国立大学"},{"subitem_text_value":"横浜国立大学"},{"subitem_text_value":"国立研究開発法人 産業技術総合研究所"}]},"item_18_text_4":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_value":"Yokohama National University","subitem_text_language":"en"},{"subitem_text_value":"Yokohama National University","subitem_text_language":"en"},{"subitem_text_value":"Yokohama National University","subitem_text_language":"en"},{"subitem_text_value":"Yokohama National University","subitem_text_language":"en"},{"subitem_text_value":"National Institute of Advanced Industrial Science and Technology","subitem_text_language":"en"}]},"item_publisher":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"情報処理学会","subitem_publisher_language":"ja"}]},"publish_status":"0","weko_shared_id":-1,"item_file_price":{"attribute_name":"Billing file","attribute_type":"file","attribute_value_mlt":[{"url":{"url":"https://ipsj.ixsq.nii.ac.jp/record/228818/files/IPSJ-CSS2023205.pdf","label":"IPSJ-CSS2023205.pdf"},"date":[{"dateType":"Available","dateValue":"2025-10-23"}],"format":"application/pdf","billing":["billing_file"],"filename":"IPSJ-CSS2023205.pdf","filesize":[{"value":"2.5 MB"}],"mimetype":"application/pdf","priceinfo":[{"tax":["include_tax"],"price":"660","billingrole":"5"},{"tax":["include_tax"],"price":"330","billingrole":"6"},{"tax":["include_tax"],"price":"0","billingrole":"30"},{"tax":["include_tax"],"price":"0","billingrole":"46"},{"tax":["include_tax"],"price":"0","billingrole":"44"}],"accessrole":"open_date","version_id":"f09039e0-8867-4d74-a14e-f2cce510973c","displaytype":"detail","licensetype":"license_note","license_note":"Copyright (c) 2023 by the Information Processing Society of Japan"}]},"item_18_creator_5":{"attribute_name":"著者名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"宮本, 岩麒"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"岩橋, 虎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"吉田, 直樹"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"吉岡, 克成"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"松本, 勉"}],"nameIdentifiers":[{}]}]},"item_18_creator_6":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Iwaki, Miyamoto","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Akira, Iwahashi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Naoki, Yoshida","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Katsunari, Yoshioka","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Tsutomu, Matsumoto","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourceuri":"http://purl.org/coar/resource_type/c_5794","resourcetype":"conference paper"}]},"item_18_description_7":{"attribute_name":"論文抄録","attribute_value_mlt":[{"subitem_description":"人工物メトリクスは，人工物の認証をその固有の特徴を用いて行う技術である．当該人工物の正当な製造者ですら再現困難な特徴を用いることが可能であるため，人工物メトリクスでは，贋物（クローン）の受理されにくさを示す「耐クローン性」を極めて高くできることが期待される．先行研究により，人工物として電子線リソグラフィにおける電子線レジスト・ピラーの倒壊現象を利用したナノメートルオーダーのランダムな凹凸構造を対象として，それを走査型電子顕微鏡，レーザー顕微鏡，白色干渉計といった高級な計測器を用いて計測するシステムでは，優れた照合精度と耐クローン性が達成できることが実証されてきた．本報告では，シンプルな（単純な構成の）白色光干渉計を用いたナノ人工物メトリックシステムであっても，照合精度と耐クローン性においてハイエンドで高度な白色干渉計を用いたシステムにほとんど劣ることのないようにできることを，実験的に示す．","subitem_description_type":"Other"}]},"item_18_description_8":{"attribute_name":"論文抄録(英)","attribute_value_mlt":[{"subitem_description":"Artifact metrics is a technology that uses features unique to an artifact to authenticate the artifact in question. Unlike conventional anti-counterfeiting technology, which relies on the technical superiority of the manufacturer as the basis for security, artifact metrics is expected to be ’clone-resistant’, as artifact uses features that is difficult to replicate, even for the manufacturer, therefore extremely difficult to clone. Previous studies have demonstrated that excellent matching accuracy and clone resistance can be achieved in a nano-artifact-metric system that adopts high-grade instrumentation such as scanning electron microscopy, laser microscopy, or white-light interferometry to measure the nanometer order random irregularities on the silicon surface fabricated based on the electron-beam resist pillar collapsing phenomenon in electron-beam lithography. This report shows experimentally that even a nano-artifact-metric system using a simple whitelight interferometer can be made to perform almost as well as a system using a high-end, advanced white-light interferometer in terms of matching accuracy and clone resistance.","subitem_description_type":"Other"}]},"item_18_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageEnd":"1512","bibliographic_titles":[{"bibliographic_title":"コンピュータセキュリティシンポジウム2023論文集"}],"bibliographicPageStart":"1505","bibliographicIssueDates":{"bibliographicIssueDate":"2023-10-23","bibliographicIssueDateType":"Issued"}}]},"relation_version_is_last":true,"weko_creator_id":"44499"},"updated":"2025-01-19T11:42:28.235187+00:00","created":"2025-01-19T01:27:57.265627+00:00","id":228818}