| Item type |
SIG Technical Reports(1) |
| 公開日 |
2022-07-19 |
| タイトル |
|
|
タイトル |
Calculation of spectral similarity independent of measurement equipment |
| タイトル |
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言語 |
en |
|
タイトル |
Calculation of spectral similarity independent of measurement equipment |
| 言語 |
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|
言語 |
eng |
| 資源タイプ |
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|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_18gh |
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資源タイプ |
technical report |
| 著者所属 |
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The University of Electro-Communications, Graduate School of Informatics and Engineerings |
| 著者所属 |
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Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属 |
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Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属 |
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Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属 |
|
|
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The University of Electro-Communications, Graduate School of Informatics and Engineerings |
| 著者所属(英) |
|
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|
en |
|
|
The University of Electro-Communications, Graduate School of Informatics and Engineerings |
| 著者所属(英) |
|
|
|
en |
|
|
Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属(英) |
|
|
|
en |
|
|
Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属(英) |
|
|
|
en |
|
|
Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science |
| 著者所属(英) |
|
|
|
en |
|
|
The University of Electro-Communications, Graduate School of Informatics and Engineerings |
| 著者名 |
Ryo, Murakami
Hiroshi, Shinotsuka
Kenji, Nagata
Hideki, Yoshikawa
Hayaru, Shouno
|
| 著者名(英) |
Ryo, Murakami
Hiroshi, Shinotsuka
Kenji, Nagata
Hideki, Yoshikawa
Hayaru, Shouno
|
| 論文抄録 |
|
|
内容記述タイプ |
Other |
|
内容記述 |
We often compared measured photoelectron spectra with other spectra for material development and quality control in the industry. In particular, X-ray photoelectron spectroscopy is used to detect surface contamination and chemical state changes. However, spectral data has perturbation of measurement devices, e.g., the difference in peak width due to the resolution of the device, and the difference in peak position due to the charging phenomenon in the spectral data. It is difficult to simply measure the distance between the measured spectra. Therefore, it is necessary to develop a method for calculating the similarity between spectra that is independent of the device. To establish a comparing procedure, we introduced a clustering method for spectral data to decouple the measurement perturbation. We designed the clustering method for detecting contamination components and sample heterogeneity. This study proposed an analytical model that separates the photoelectron peaks from the perturbation caused by the measurement device. We applied the method to calculate the similarity between the spectra. As a result, we show the proposed method could detect spectral data included with other components in the analysis of real X-ray photo-electron spectroscopy spectral data of TiO2. |
| 論文抄録(英) |
|
|
内容記述タイプ |
Other |
|
内容記述 |
We often compared measured photoelectron spectra with other spectra for material development and quality control in the industry. In particular, X-ray photoelectron spectroscopy is used to detect surface contamination and chemical state changes. However, spectral data has perturbation of measurement devices, e.g., the difference in peak width due to the resolution of the device, and the difference in peak position due to the charging phenomenon in the spectral data. It is difficult to simply measure the distance between the measured spectra. Therefore, it is necessary to develop a method for calculating the similarity between spectra that is independent of the device. To establish a comparing procedure, we introduced a clustering method for spectral data to decouple the measurement perturbation. We designed the clustering method for detecting contamination components and sample heterogeneity. This study proposed an analytical model that separates the photoelectron peaks from the perturbation caused by the measurement device. We applied the method to calculate the similarity between the spectra. As a result, we show the proposed method could detect spectral data included with other components in the analysis of real X-ray photo-electron spectroscopy spectral data of TiO2. |
| 書誌レコードID |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AN10505667 |
| 書誌情報 |
研究報告数理モデル化と問題解決（MPS）
巻 2022-MPS-139,
号 5,
p. 1-4,
発行日 2022-07-19
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| ISSN |
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収録物識別子タイプ |
ISSN |
|
収録物識別子 |
2188-8833 |
| Notice |
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SIG Technical Reports are nonrefereed and hence may later appear in any journals, conferences, symposia, etc. |
| 出版者 |
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言語 |
ja |
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出版者 |
情報処理学会 |
IPSJ-MPS22139005.pdf (5.0 MB)
