@techreport{oai:ipsj.ixsq.nii.ac.jp:00209740,
 author = {辻, 俊宏 and 小原, 良和 and 三原, 毅 and Toshihiro, Tsuji and Yoshikazu, Ohara and Tsuyoshi, Mihara},
 issue = {2},
 month = {Feb},
 note = {高純度ガスを扱うためのステンレス配管システムにおいては極低濃度の水分 (微量水分) の吸脱着が問題になり得る．その調査には規定濃度のプローブガスの通過挙動を測定するインバースガスクロマトグラフィ (IGC) が有効と考えられるが，検出器の小型化やユーティリティの確保に課題があり，現場配管に適用可能な計測法はまだ開発されていない．本稿では球状弾性表面波センサによる微量水分測定を用いた IGC について基礎検討を行った結果を報告する．, The adsorption and desorption of the trace moisture less than 1ppmv may cause the problems in stainless-steel tube system for highly pure gas. A concept of inverse gas chromatography (IGC), that measures the behavior of probe gas with known concentration passing through, is useful for the inspection. However, on-site measurement method has not been developed because of difficulties in down-sizing and preparing the equipment such as vacuum pumping and sufficient power source. In this paper, we report preliminary results for realizing IGC using the ball surface acoustic wave trace moisture sensor.},
 title = {球状弾性表面波センサを用いる微量水分インバースガスクロマトグラフィの基礎検討},
 year = {2021}
}