{"updated":"2025-01-20T06:39:01.414362+00:00","metadata":{"_oai":{"id":"oai:ipsj.ixsq.nii.ac.jp:00174522","sets":["6164:6165:7651:8901"]},"path":["8901"],"owner":"11","recid":"174522","title":["Self-Aligned Double Patterningのための柔軟な2彩色配線法の提案"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-09-07"},"_buckets":{"deposit":"fbaa4826-bc5b-4696-94d8-c54f62eb09fe"},"_deposit":{"id":"174522","pid":{"type":"depid","value":"174522","revision_id":0},"owners":[11],"status":"published","created_by":11},"item_title":"Self-Aligned Double Patterningのための柔軟な2彩色配線法の提案","author_link":["359595","359592","359596","359593","359594","359597"],"item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Self-Aligned Double Patterningのための柔軟な2彩色配線法の提案"},{"subitem_title":"Flexible Two-Colorable Routing for Self-Aligned Double Patterning","subitem_title_language":"en"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"物理設計･回路設計","subitem_subject_scheme":"Other"}]},"item_type_id":"18","publish_date":"2016-09-07","item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_18_text_3":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京工業大学工学院情報通信系"},{"subitem_text_value":"東京工業大学工学院情報通信系"},{"subitem_text_value":"東京工業大学工学院情報通信系"}]},"item_18_text_4":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_value":"Department of Information and Communications Engineering, Tokyo Institute of Technology","subitem_text_language":"en"},{"subitem_text_value":"Department of Information and Communications Engineering, Tokyo Institute of Technology","subitem_text_language":"en"},{"subitem_text_value":"Department of Information and Communications Engineering, Tokyo Institute of Technology","subitem_text_language":"en"}]},"item_publisher":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"情報処理学会","subitem_publisher_language":"ja"}]},"publish_status":"0","weko_shared_id":-1,"item_file_price":{"attribute_name":"Billing file","attribute_type":"file","attribute_value_mlt":[{"url":{"url":"https://ipsj.ixsq.nii.ac.jp/record/174522/files/IPSJ-DAS2016006.pdf","label":"IPSJ-DAS2016006.pdf"},"date":[{"dateType":"Available","dateValue":"2018-09-07"}],"format":"application/pdf","billing":["billing_file"],"filename":"IPSJ-DAS2016006.pdf","filesize":[{"value":"1.9 MB"}],"mimetype":"application/pdf","priceinfo":[{"tax":["include_tax"],"price":"660","billingrole":"5"},{"tax":["include_tax"],"price":"330","billingrole":"6"},{"tax":["include_tax"],"price":"330","billingrole":"10"},{"tax":["include_tax"],"price":"330","billingrole":"44"}],"accessrole":"open_date","version_id":"f66926a2-848c-44d2-b63c-c743d4dce784","displaytype":"detail","licensetype":"license_note","license_note":"Copyright (c) 2016 by the Information Processing Society of Japan"}]},"item_18_creator_5":{"attribute_name":"著者名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"木村, 優介"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"佐藤, 真平"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"高橋, 篤司"}],"nameIdentifiers":[{}]}]},"item_18_creator_6":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Yusuke, Kimura","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Shinpei, Sato","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Atsushi, Takahashi","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourceuri":"http://purl.org/coar/resource_type/c_5794","resourcetype":"conference paper"}]},"item_18_description_7":{"attribute_name":"論文抄録","attribute_value_mlt":[{"subitem_description":"Self-Aligned Double Patterning（SADP） は，側壁スペーサープロセスを用いて微細なパターンを実現するが，SADP で実現できるパターンは 2 彩色可能なパターンに限られる．SADP で実現可能なパターンで配線を実現する様々な配線手法が提案されているが，配線の色を決めながら逐次的に配線を行う配線手法では，既配線の経路と決められた色の影響で，2 彩色可能な配線パターンが得られないことがある．本稿では，配線の色を確定せず逐次的に配線を行うが，配線の色が既配線と同色となるか異色となるかを考慮しながら，できる限り 2 彩色可能性を失わない配線経路を選択することで，2 彩色可能な配線パターンを得られる可能性を高める柔軟な 2 彩色配線手法を提案する．","subitem_description_type":"Other"}]},"item_18_description_8":{"attribute_name":"論文抄録(英)","attribute_value_mlt":[{"subitem_description":"Self-Aligned Double Patterning (SADP) realizes fine pitch patterns by using sidewall process, but a pattern must be two-colorable. There are various routing methods for SADP in order to obtain a routing pattern that is two-colorable and that can be realized by SADP. However, a two-colorable routing pattern might not be obtained if a route is iteratively generated with color assignment. In this paper, we propose a flexible routing method for SADP. In our proposed method, a route is iteratively generated without color assignment, but two-colorability of routing pattern is maintained as much as possible during routing by taking the constraint on two-colorability into account, and the probability to obtain a two-colorable routing pattern is increased.","subitem_description_type":"Other"}]},"item_18_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageEnd":"31","bibliographic_titles":[{"bibliographic_title":"DAシンポジウム2016論文集"}],"bibliographicPageStart":"26","bibliographicIssueDates":{"bibliographicIssueDate":"2016-09-07","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicVolumeNumber":"2016"}]},"relation_version_is_last":true,"weko_creator_id":"11"},"created":"2025-01-19T00:44:42.878068+00:00","id":174522,"links":{}}