Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model

• Item type: Trans(1)
• 公開日: 2007-02-15
• タイトル: Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model
• タイトル / 言語: en
• タイトル: Simulation of Compositional Variation in Liquid Phase Epitaxy InGaP Using a Two Dimensional Model
• 言語: eng
• キーワード / 主題Scheme: Other
• キーワード / 主題: オリジナル論文
• 資源タイプ / 資源タイプ識別子: http://purl.org/coar/resource_type/c_6501
• 資源タイプ: journal article
• 著者所属: Department of Environmental Technology and Urban Planning Nagoya Institute of Technology
• 著者所属: Department of Environmental Technology and Urban Planning Nagoya Institute of Technology
• 著者所属: Department of Electrical and Electronic Engineering Mie University
• 著者所属: Research Center for Nano-Device and System Nagoya Institute of Technology
• 著者所属: Department of Environmental Technology and Urban Planning Nagoya Institute of Technology
• 著者所属(英): en
• 著者所属(英): Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology
• 著者所属(英): en
• 著者所属(英): Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology
• 著者所属(英): en
• 著者所属(英): Department of Electrical and Electronic Engineering, Mie University
• 著者所属(英): en
• 著者所属(英): Research Center for Nano-Device and System, Nagoya Institute of Technology
• 著者所属(英): en
• 著者所属(英): Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology
• 著者名: Hiromoto, Susawa; Toshihiro, Tsuji; Kazumasa, Hiramatsu; Takashi, Jimbo; Tetsuo, Soga
• 著者名(英): Hiromoto, Susawa; Toshihiro, Tsuji; Kazumasa, Hiramatsu; Takashi, Jimbo; Tetsuo, Soga
• 論文抄録 / 内容記述タイプ: Other
• 論文抄録 / 内容記述: Compositional variation in initial growth was observed in Liquid Phase Epitaxy (LPE) experiments. It is thought that the cause is the flow of the melt which is induced by the slide of the entire melt from the place where there isn’t substrate to the substrate before growth. The phenomenon was simulated with a one dimensional model in InGaP growth with a convection term added to a diffusion-limited model. The velocity of flow in the melt was approximated to Stokes’s first problem. It was shown that composition of In in grown solid with the flow is larger than that without the flow. In this paper InGaP LPE growth is considered and a two dimensional model of the flow is used. For the solute transport a two dimensional model is also adopted except at the growth interface. A result similar to the one dimensional model was obtained. In the two dimensional model In composition is greater than that in the case without flow for the greater part of the growth time but decreases when the flow transports dilute solution. This decrease doesn’t appear in the one dimensional model. This phenomenon can be explained by considering the influence of the flow on the mole fraction near the boundary layer.
• 論文抄録(英) / 内容記述タイプ: Other
• 論文抄録(英) / 内容記述: Compositional variation in initial growth was observed in Liquid Phase Epitaxy (LPE) experiments. It is thought that the cause is the flow of the melt which is induced by the slide of the entire melt from the place where there isn’t substrate to the substrate before growth. The phenomenon was simulated with a one dimensional model in InGaP growth with a convection term added to a diffusion-limited model. The velocity of flow in the melt was approximated to Stokes’s first problem. It was shown that composition of In in grown solid with the flow is larger than that without the flow. In this paper, InGaP LPE growth is considered and a two dimensional model of the flow is used. For the solute transport, a two dimensional model is also adopted except at the growth interface. A result similar to the one dimensional model was obtained. In the two dimensional model, In composition is greater than that in the case without flow for the greater part of the growth time, but decreases when the flow transports dilute solution. This decrease doesn’t appear in the one dimensional model. This phenomenon can be explained by considering the influence of the flow on the mole fraction near the boundary layer.
• 書誌レコードID / 収録物識別子タイプ: NCID
• 書誌レコードID / 収録物識別子: AA11464803
• 書誌情報: 情報処理学会論文誌数理モデル化と応用（TOM）; 巻 48, 号 SIG2(TOM16), p. 147-157, 発行日 2007-02-15
• ISSN / 収録物識別子タイプ: ISSN
• ISSN / 収録物識別子: 1882-7780
• 出版者 / 言語: ja
• 出版者: 情報処理学会