{"updated":"2025-01-20T18:05:03.142095+00:00","metadata":{"_oai":{"id":"oai:ipsj.ixsq.nii.ac.jp:00146146","sets":["1164:2036:7856:8381"]},"path":["8381"],"owner":"11","recid":"146146","title":["Self-Aligned Quadruple Patterningのための 3 次配線アルゴリズムを用いた効率的な配線生成手法"],"pubdate":{"attribute_name":"公開日","attribute_value":"2015-11-24"},"_buckets":{"deposit":"5f719897-45d8-4ff2-9dde-28875e2aa6c2"},"_deposit":{"id":"146146","pid":{"type":"depid","value":"146146","revision_id":0},"owners":[11],"status":"published","created_by":11},"item_title":"Self-Aligned Quadruple Patterningのための 3 次配線アルゴリズムを用いた効率的な配線生成手法","author_link":["227058","227061","227060","227059"],"item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Self-Aligned Quadruple Patterningのための 3 次配線アルゴリズムを用いた効率的な配線生成手法"},{"subitem_title":"Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning","subitem_title_language":"en"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"配置配線","subitem_subject_scheme":"Other"}]},"item_type_id":"4","publish_date":"2015-11-24","item_4_text_3":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京工業大学大学院理工学研究科通信情報工学専攻"},{"subitem_text_value":"東京工業大学大学院理工学研究科通信情報工学専攻"}]},"item_4_text_4":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_value":"Department of Communications and Computer Engineering, Tokyo Institute of Technology","subitem_text_language":"en"},{"subitem_text_value":"Department of Communications and Computer Engineering, Tokyo Institute of Technology","subitem_text_language":"en"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_publisher":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"情報処理学会","subitem_publisher_language":"ja"}]},"publish_status":"0","weko_shared_id":-1,"item_file_price":{"attribute_name":"Billing file","attribute_type":"file","attribute_value_mlt":[{"url":{"url":"https://ipsj.ixsq.nii.ac.jp/record/146146/files/IPSJ-SLDM15173020.pdf","label":"IPSJ-SLDM15173020.pdf"},"format":"application/pdf","billing":["billing_file"],"filename":"IPSJ-SLDM15173020.pdf","filesize":[{"value":"1.8 MB"}],"mimetype":"application/pdf","priceinfo":[{"tax":["include_tax"],"price":"0","billingrole":"10"},{"tax":["include_tax"],"price":"0","billingrole":"44"}],"accessrole":"open_login","version_id":"47acdb88-c8d6-432c-b741-bc1d93309a47","displaytype":"detail","licensetype":"license_note","license_note":"Copyright (c) 2015 by the Institute of Electronics, Information and Communication Engineers This SIG report is only available to those in membership of the SIG."}]},"item_4_creator_5":{"attribute_name":"著者名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"井原, 岳志"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"高橋, 篤司"}],"nameIdentifiers":[{}]}]},"item_4_creator_6":{"attribute_name":"著者名(英)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Takeshi, Ihara","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Atsushi, Takahashi","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_4_source_id_9":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11451459","subitem_source_identifier_type":"NCID"}]},"item_4_textarea_12":{"attribute_name":"Notice","attribute_value_mlt":[{"subitem_textarea_value":"SIG Technical Reports are nonrefereed and hence may later appear in any journals, conferences, symposia, etc."}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourceuri":"http://purl.org/coar/resource_type/c_18gh","resourcetype":"technical report"}]},"item_4_source_id_11":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"2188-8639","subitem_source_identifier_type":"ISSN"}]},"item_4_description_7":{"attribute_name":"論文抄録","attribute_value_mlt":[{"subitem_description":"Self-Aligned Quadruple Patterning(SAQP) は 14nm ノードにおける重要な製造技術である．SAQP に関する様々な配線アルゴリズムが提案されているが，効率的に密集した SAQP に適した配線パターンを見つけることは容易ではない．SAQP に適した配線パターンのためのグリッドが提案されているが，グリッド上で有効な配線パターンを見つけることは容易ではないグリッド上で，SAQP の配線パターンは 3 種類の配線から構成される．それらの中で，3 次パターンは折れ曲がり禁止制約を持つ．一般的な配線アルゴリズムでは，SAQP で製造可能な有効な 3 次パターンを見つけることに失敗することがある．本稿では，グリッド上で最適で有効な 3 次パターンを見つけることで，SAQP に適した 2 次元パターンを見つける．実験で SAQP に適した配線パターンを効率的に見つけられたことを示す．","subitem_description_type":"Other"}]},"item_4_description_8":{"attribute_name":"論文抄録(英)","attribute_value_mlt":[{"subitem_description":"Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14 nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, SAQP compliant two dimensional routing patterns are found on the grid by finding an optimal valid tertiary pattern effectively. Experiments show that SAQP compliant routing patterns are found efficiently.","subitem_description_type":"Other"}]},"item_4_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageEnd":"6","bibliographic_titles":[{"bibliographic_title":"研究報告システムとLSIの設計技術（SLDM）"}],"bibliographicPageStart":"1","bibliographicIssueDates":{"bibliographicIssueDate":"2015-11-24","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"20","bibliographicVolumeNumber":"2015-SLDM-173"}]},"relation_version_is_last":true,"weko_creator_id":"11"},"created":"2025-01-19T00:21:38.707775+00:00","id":146146,"links":{}}