{"metadata":{"_oai":{"id":"oai:ipsj.ixsq.nii.ac.jp:00122272","sets":["6504:8020:8026"]},"path":["8026"],"owner":"1","recid":"122272","title":["投影エッジ相関法(2)LSI配線の自動プロービング"],"pubdate":{"attribute_name":"公開日","attribute_value":"1992-09-28"},"_buckets":{"deposit":"6834364d-e252-4dad-ba4e-f5d92218b4a3"},"_deposit":{"id":"122272","pid":{"type":"depid","value":"122272","revision_id":0},"owners":[1],"status":"published","created_by":1},"item_title":"投影エッジ相関法(2)LSI配線の自動プロービング","author_link":[],"item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"投影エッジ相関法(2)LSI配線の自動プロービング"},{"subitem_title":"Automatic EB probing on an LSl interconnection line using Projection Edge-extraction Correlation Sequence","subitem_title_language":"en"}]},"item_type_id":"22","publish_date":"1992-09-28","item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_22_text_3":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"株式会社富士通研究所 厚木研究所"},{"subitem_text_value":"株式会社富士通研究所 厚木研究所"},{"subitem_text_value":"株式会社富士通研究所 厚木研究所"}]},"item_22_text_4":{"attribute_name":"著者所属(英)","attribute_value_mlt":[{"subitem_text_value":"FUJITSU LABORATORIES LTD.,ATSUGI","subitem_text_language":"en"},{"subitem_text_value":"FUJITSU LABORATORIES LTD.,ATSUGI","subitem_text_language":"en"},{"subitem_text_value":"FUJITSU LABORATORIES LTD.,ATSUGI","subitem_text_language":"en"}]},"item_publisher":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"情報処理学会","subitem_publisher_language":"ja"}]},"publish_status":"0","weko_shared_id":-1,"item_file_price":{"attribute_name":"Billing file","attribute_type":"file","attribute_value_mlt":[{"url":{"url":"https://ipsj.ixsq.nii.ac.jp/record/122272/files/KJ00001343969.pdf"},"date":[{"dateType":"Available","dateValue":"1992-09-28"}],"format":"application/pdf","filename":"KJ00001343969.pdf","filesize":[{"value":"168.2 kB"}],"mimetype":"application/pdf","accessrole":"open_date","version_id":"8a45a56f-0604-47e7-af3f-995a63afb5c0","displaytype":"detail","licensetype":"license_note"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourceuri":"http://purl.org/coar/resource_type/c_5794","resourcetype":"conference paper"}]},"item_22_source_id_9":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00349328","subitem_source_identifier_type":"NCID"}]},"item_22_description_7":{"attribute_name":"論文抄録","attribute_value_mlt":[{"subitem_description":"自動プロービングへの応用を通して投影エッジ相関法の実用性の評価を行うことを目的として,投影エッジ相関法による電子ビーム(EB)自動位置決め処理をEBテスタに組み込み,LSI内部配線の自動プロービングを行った。本報告では,まず自動プロービングの構成を記し,次に測定シーケンスの正常動作の検証,位置決め精度・処理時間の評価を行った結果について述べる。","subitem_description_type":"Other"}]},"item_22_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageEnd":"440","bibliographic_titles":[{"bibliographic_title":"全国大会講演論文集"}],"bibliographicPageStart":"439","bibliographicIssueDates":{"bibliographicIssueDate":"1992-09-28","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"データ処理","bibliographicVolumeNumber":"第45回"}]},"relation_version_is_last":true,"weko_creator_id":"1"},"updated":"2025-01-21T03:25:45.096631+00:00","created":"2025-01-19T00:02:30.419347+00:00","links":{},"id":122272}