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oai:ipsj.ixsq.nii.ac.jp:00174522 2025-01-20T06:39:01Z 6164:6165:7651:8901

Self-Aligned Double Patterningのための柔軟な2彩色配線法の提案 Flexible Two-Colorable Routing for Self-Aligned Double Patterning 木村, 優介 佐藤, 真平 高橋, 篤司 Yusuke, Kimura Shinpei, Sato Atsushi, Takahashi 物理設計･回路設計 Self-Aligned Double Patterning（SADP） は，側壁スペーサープロセスを用いて微細なパターンを実現するが，SADP で実現できるパターンは 2 彩色可能なパターンに限られる．SADP で実現可能なパターンで配線を実現する様々な配線手法が提案されているが，配線の色を決めながら逐次的に配線を行う配線手法では，既配線の経路と決められた色の影響で，2 彩色可能な配線パターンが得られないことがある．本稿では，配線の色を確定せず逐次的に配線を行うが，配線の色が既配線と同色となるか異色となるかを考慮しながら，できる限り 2 彩色可能性を失わない配線経路を選択することで，2 彩色可能な配線パターンを得られる可能性を高める柔軟な 2 彩色配線手法を提案する． Self-Aligned Double Patterning (SADP) realizes fine pitch patterns by using sidewall process, but a pattern must be two-colorable. There are various routing methods for SADP in order to obtain a routing pattern that is two-colorable and that can be realized by SADP. However, a two-colorable routing pattern might not be obtained if a route is iteratively generated with color assignment. In this paper, we propose a flexible routing method for SADP. In our proposed method, a route is iteratively generated without color assignment, but two-colorability of routing pattern is maintained as much as possible during routing by taking the constraint on two-colorability into account, and the probability to obtain a two-colorable routing pattern is increased. 情報処理学会 2016-09-07 jpn conference paper https://ipsj.ixsq.nii.ac.jp/records/174522 DAシンポジウム2016論文集 2016 6 26 31 https://ipsj.ixsq.nii.ac.jp/record/174522/files/IPSJ-DAS2016006.pdf application/pdf 1.9 MB 2018-09-07