@article{weko_6968_1,
   author	 = "後藤,英一 and 相馬,嵩 and 出澤,正徳 and 佐々木,建昭",
   title	 = "超 LSI 用電子ビーム露光法",
   journal	 = "情報処理",
   year 	 = "1979",
   volume	 = "20",
   number	 = "3",
   month	 = "mar"
}