@article{weko_60249_1,
   author	 = "Tomokazu,Kawabata and Itaru,Aramaki and Kazuhiko,Arimoto",
   title	 = "Automation of Etching Pattern Layout",
   journal	 = "Information Processing in Japan",
   year 	 = "1970",
   volume	 = "10",
   number	 = "0",
   pages	 = "40--43",
   month	 = "jan"
}