@techreport{weko_28404_1,
   author	 = "佐藤耐",
   title	 = "ISSCC’87報告",
   year 	 = "1987",
   institution	 = "（株）東芝　半導体技術研究所",
   number	 = "32(1987-SLDM-037)",
   month	 = "may"
}