@techreport{weko_27473_1,
   author	 = "Andrzej,Strojwas",
   title	 = "Design - Manufacturing Interface for .13 um and below",
   year 	 = "2002",
   institution	 = "Carnegie Mellon University",
   number	 = "113(2002-SLDM-107)",
   month	 = "nov"
}