@inproceedings{weko_198708_1, author = "高橋,秀和 and 佐藤,真平 and 高橋,篤司", title = "CCASを用いた局所特徴量に基づくリソグラフィホットスポット検出器の検討", booktitle = "DAシンポジウム2019論文集", year = "2019", volume = "2019", number = "", pages = "99--104", month = "aug" }