@inproceedings{weko_172757_1,
   author	 = "砂長,裕 and 桜井,将人 and 山本,洋介 and 古宮,誠一（芝浦工大）",
   title	 = "拡張オーバレイモデルの実験による有効性確認",
   booktitle	 = "第68回全国大会講演論文集",
   year 	 = "2006",
   volume	 = "2006",
   number	 = "1",
   pages	 = "389--390",
   month	 = "mar"
}