@article{weko_15206_1,
   author	 = "栗原,謙三 and 小林,隆 and 明石,吉三",
   title	 = "半導体プロセス診断エキスパートシステム",
   journal	 = "情報処理学会論文誌",
   year 	 = "1989",
   volume	 = "30",
   number	 = "7",
   pages	 = "918--921",
   month	 = "jul"
}