@inproceedings{weko_144817_1,
   author	 = "Ahmed,Awad and Atsushi,Takahashi",
   title	 = "Mask Manufacturability Aware Post OPC Algorithm For Optical Lithography",
   booktitle	 = "DAシンポジウム2015論文集",
   year 	 = "2015",
   volume	 = "2015",
   number	 = "",
   pages	 = "119--124",
   month	 = "aug"
}