@inproceedings{weko_139577_1, author = "福田,佑貴 and 廣島,佑 and 渡辺,重佳", title = "一層型FinFET、積層型FinFETを用いたシステムLSIのパターン面積の比較", booktitle = "全国大会講演論文集", year = "2010", volume = "第72回", number = "アーキテクチャ", pages = "229--230 ", month = "mar" }