@inproceedings{weko_122271_1,
   author	 = "大窪,和生 and 手操,弘典 and 伊藤,昭夫",
   title	 = "投影エッジ相関法(1)LSIマスク図とSEM像のアライメント",
   booktitle	 = "全国大会講演論文集",
   year 	 = "1992",
   volume	 = "第45回",
   number	 = "データ処理",
   pages	 = "437--438",
   month	 = "sep"
}