@inproceedings{weko_114388_1,
   author	 = "小林,隆 and 栗原,謙三 and 明石,吉三",
   title	 = "知識ベースに基づく半導体プロセス診断システムの機能構成",
   booktitle	 = "全国大会講演論文集",
   year 	 = "1986",
   volume	 = "第33回",
   number	 = "パターン処理および人工知能",
   pages	 = "1181--1182",
   month	 = "oct"
}