@inproceedings{weko_102766_1,
   author	 = "星,克也 and 藤吉,邦洋",
   title	 = "可変成形型電子ビーム露光データ生成のためのレイアウトのL型分割手法",
   booktitle	 = "DAシンポジウム2014論文集",
   year 	 = "2014",
   volume	 = "2014",
   number	 = "",
   pages	 = "139--143",
   month	 = "aug"
}